Rinse To Resistivity

Rinse to Resistivity Option — better control saves Time and Money

Stop guessing! Determine in real time when your substrate is fully rinsed.

• Constantly measures the drain fluids electrical conductivity to determine when to end the rinse and start drying

• Accurately detecting when the chemical has been adequately rinsed from the substrate and process chamber completely removes this variable, especially when different process chemicals concentrations are used.

• Sensing a resistivity setpoint can be fully integrated into your processing sequence. Don't worry, there's also an adjustable bypass time in case something unexpected happens while the system is running unattended.

• Save processing TIME (the absolute best result in the shortest possible time — no more guessing!)

• Saves Rinse MATERIAL COST (solvent / DI water)

• Saves WASTE DISPOSAL COST (eliminates unnecessarily wasted resources year after year)