400-Series Controller

Features include:

• Real-time display of all program functions
• 20 program / 51 steps per program memory storage on each controller (the number of programs and steps/program may be rearranged at the factory at no additional cost)
• Permanent (non-volatile) setup and program storage
• Digital readout of closed loop speed control — control resolution is 0.0 RPM
• Our Repeatability specification is 0.0 RPM with no accumulation of error — SO NO CALIBRATION IS EVER NECESSARY!
• Acceleration/deceleration rate programmable in every step
• Vacuum interlock — display of actual vacuum at the wafer (will not allow rotation if hold-down force is insufficient) the set point is user adjustable
• Lid interlock — rotation is disallowed when the process chamber is open
• Energy-saving automatic shutdown of display backlighting after 10 minutes of non-use, with instant-on after any keypress
• Step time from 0.1 seconds to 99 minutes 59.9 seconds
• Selectable skip-step (to quickly move forward in the process while it is running)
• Password-protected feature (disallows program alteration by others when enabled)

Operation

The operator interface panel has an easily read back-lighted information display with function-oriented membrane keypad.

Programming is no more than pushing a few arrow keys while viewing the parameters change. A program can be selected and initiated with as few as two keystrokes. Each program step includes: time, speed, and an acceleration or deceleration rate. A lid interlock disallows motor rotation immediately if the lid ever inadvertantely opened to avoid splashing or hurting the operator no matter what their skill level. A design feature is also included to avoid accidentally re-running a process on the same wafer but can be easily bypassed if necessary.

The process controller was designed by LTC specifically for this application, and therefore is very easy to program and use. By holding the processor in program mode, a completely manual operation can be achieved for a real "hands-on feel." This functionality is helpful for setting up experiments where adjustments cannot be made dynamically.

Availability

The WS-400 Series spin processor has been replaced with the WS-650 Series, effective August, 2011.